Topography and refractometry of nanostructures using spatial light interference microscopy

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Topography and refractometry of nanostructures using spatial light interference microscopy.

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Spatial Light Interference Microscopy (SLIM) is a novel method developed in our laboratory that provides quantitative phase images of transparent structures with 0.3 nm spatial and 0.03 nm temporal accuracy owing to the white light illumination and its common path interferometric geometry. We exploit these features and demonstrate SLIM's ability to perform topography at a single atomic layer in...

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ژورنال

عنوان ژورنال: Optics Letters

سال: 2010

ISSN: 0146-9592,1539-4794

DOI: 10.1364/ol.35.000208